Product features

– High Vacuum Environment.

– Compatible with Multiple Operation Paths.

– High Cleanliness.

– High-Speed, Stable, and High-Precision.

– Safe and Damage-Free Transfer.

– Intelligent material tracking and tracing with precise positioning.

– Fault diagnosis and prediction.

Core technology

– Vacuum Chamber Design Technology.

– Vacuum Sealing Design Technology.

– Vacuum System Design Technology.

– Vacuum Robot Control Technology.

– Intelligent Substrate Scheduling Technology.

– Substrate Alignment Design Technology.