Hefei Sineva Intelligent Machine Co., Ltd. was established in 2013 and is a leading provider of advanced pan-semiconductor high-end equipment in China. The company focuses on the research, development, production, sales, and technical services of pan-semiconductor vacuum coating equipment, clean transfer equipment, and high-speed high-precision equipment. Guided by national strategic needs, Sineva addresses industry challenges and supports sector development, serving numerous tier 1 clients within the global pan-semiconductor supply chain across displays, integrated circuits, and photovoltaics. With cutting-edge technology and relentless innovation, Sineva has become a crucial enabler in the pan-semiconductor manufacturing sector.

Sineva's 80,000-square-meter research and manufacturing base is located in Hefei New Station District. As a national high-tech enterprise, the company leads and participates in multiple national key research and development plans, contributes to the development of industry standards, and has been recognized at the 2021 National "13th Five-Year Plan" Science and Technology Innovation Achievement Exhibition. Sineva has been honored with numerous awards, including the China Industry-University-Research Collaboration Innovation Achievement Award (First Prize), Anhui Science and Technology Award (First Prize), and Anhui Quality Award, among others.

Through continuous research and development, Sineva has overcome key technical challenges in the industry, establishing three major product and technology platforms: vacuum coating, clean transfer, and high-speed high-precision equipment. These platforms enable Sineva to focus on displays, integrated circuits, and photovoltaics, developing a range of advanced equipment that maintains a competitive edge in diversified business expansion.

Vacuum Coating Technology:

Since 2015, Sineva has been dedicated to OLED display panel vacuum coating technology research and development, aiming to solve the industrialization challenges of OLED panel vacuum coating. Display vapor deposition equipment is the core process equipment for OLED display panels, previously dominated by foreign manufacturers. Sineva has successfully developed a series of domestic G1 to high-generation display vapor deposition equipment, with key core components such as small-generation equipment, evaporation sources, and high-precision alignment systems for high-generation vapor deposition equipment delivered to customers for mass production applications. Through innovative design of heating and cooling units, and the development of relevant control devices and programs, Sineva ensures precise control of the evaporation temperature field, enabling particle evaporation under the material equilibrium vapor pressure, achieving an internationally advanced level of film thickness uniformity ≤3%.

In 2020, Sineva applied its OLED vacuum coating technology innovation to the core process of perovskite solar cell manufacturing and quickly completed development and mass production applications with leading customers. This technology transfer reduces research and development costs, accelerates product mass production and iteration. In the perovskite photovoltaic field, Sineva has developed a series of perovskite vapor deposition equipment products from pilot to GW-level mass production, providing key equipment support for the large-scale production of perovskite batteries. Currently, all four GW-level mass production lines invested in globally use equipment developed by Sineva.

Clean Transfer Technology:

Sineva primarily provides high cleanliness and high-precision material handling and transportation technology for core process steps such as etching, coating, and photoresist development in display panels, integrated circuits, and other fields, ensuring efficient and high yield mass production of core process steps. In the integrated circuit field, Sineva's semiconductor automated material handling system (AMHS) is mainly applied to the wafer handling and storage of core process steps such as lithography, etching, and coating, realizing intelligent and high-speed material handling between core process steps and ensuring stable and efficient production. Sineva is one of the few domestic enterprises to break foreign monopolies and has achieved stable mass production applications in several domestic 8-inch and 12-inch semiconductor customer wafer fabs. In the semiconductor display field, Sineva has solved the technical challenges of handling large, thin, and fragile glass substrates for G6-G10.5 product lines and developed clean transfer robots for intelligent substrate handling and transportation in core process steps such as etching, coating, and photoresist development in semiconductor displays, ensuring production efficiency and product yield in high cleanliness environments.

High-Speed High-Precision Technology:

Sineva primarily focuses on technological breakthroughs and development for advanced packaging in new display and integrated circuits, achieving industrial application of key core equipment in related fields. In advanced packaging for integrated circuits, Sineva primarily addresses the core process technology of high-speed and high-precision placement for advanced packaging, meeting the strict requirements of placement speed and accuracy in the advanced packaging field. Through innovative technology development, Sineva has realized direct high-speed flip-chip placement technology, which is more than 5 times faster than the traditional placement technology dominated by foreign companies, significantly improving customer production efficiency and reducing production costs. In new semiconductor displays, Sineva has developed micron-level LED chip high-speed and high-precision mass transfer technology, developing the world's first large-size Mini LED mass transfer equipment for batch production. Additionally, Sineva has completed the development of Micro LED laser mass transfer equipment, which has been delivered to customers for mass production applications.

Sineva, with years of technology and experience accumulation, has formed five major product lines and six technology development and design centers based on vacuum coating, clean transfer, and high-speed high-precision technologies, improving the reusability of common technology development and design, becoming an important force driving the independentization of China's high-end equipment manufacturing process. Sineva has successfully expanded into multiple industry fields and will continue to focus on high-end manufacturing equipment, improve industrial layout, and promote faster and better industry development, contributing to China's high-level science and technology self-reliance with innovative technical capabilities and deep industry experience.