Product features

– Water and oxygen content < 1 ppm.

– Chamber leak rate complies with ISO 10648-2, Class 1, < 0.05 vol%/h.

– Flexible customized design.

– Precise positioning with an accuracy of ±0.1 mm.

– Customization of integrated line solutions.

Core technology

– Composite shell structure for chambers.

– Localized stiffener layout.

– High-precision and high-stability system control.

– Nitrogen circulation system.

– Information and intelligence.