Near Tool Buffer
Application: As the buffer space at the front end of the equipment with high production tempo, it temporarily stores the wafer materials waiting for processing and transportation, automatically and quickly completes the material pick-and-place docking tasks of OHT and load port, and greatly improve the efficiency of industrial equipment

Product features

– High cleanliness, high precision, high reliability

– Drawer-type pull-out Manual Port

– Provide customized system for 2-4Port

– 6-12 buffers can be configured as required

– SEMI Standard Compliance, can interact with the Fab system data, and connect to the OHT system based on the E84 communication protocol

Core Technology

– High precision, high reliability,high cleanliness

– Vibration suppression technology

Message board