Application: Widely used in wafer box automatic storage on the production line in semiconductor chip production, packaging and silicon wafer manufacturing industry. As a material storage space to balance the capacity difference between production process equipment, it can increase the space utilization rate of the clean room
Product features
– Comprehensive collision prevention and safety interlocking
– High performance vibration suppression and smooth operation
– Less space occupied
– Lightweight structural design
– Multidimensional and high-precision positioning
Core Technology
– High cleanliness design
– Fault diagnosis and predicting technique
– Vibration Control Technology